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Secondary Ion Mass Spectrometry s-SIMS
The Cameca IMS4F performs inorganic surface analysis as well as in-depth analysis with high sensitivity. An energetic primary ion beam bombards the sample surface from which secondary particles are generated. All secondary ions are impulse filtered by sequentially scanning the magnetic field, giving rise to a spectrum. The position sensitive detector allows elemental mappings at high lateral resolution.See also: The UIA TOF-SIMS Service.Applications are found in the semiconductor industry, polymers, corrosion science, organic coating characterisation, etc.
Instrument
- Cameca Ion TOF IV
- Time-of-flight mass analyser
- Mass resolution: up to 10,000
- Mass accuracy: 0.005 amu (lower mass range)
- Mass range: unlimited (practical limit: 7,200 amu)
- Depth resolution: < 2 nm (dual beam)
- Lateral resolution: < 100 nm (Ga+ LMIS)
Analytical characteristics
- Analytical information: mass spectra, depth profiles, SI images
- Molecular information
- Detection limit: ppm (ppb)
- Information depth: uppermost monolayer(s)
- Conducting and non conducting samples
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